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新能源	锂锂矿锂化合物金属锂镍镍矿镍铁精炼镍镍盐高冰镍 MHP 钴电解钴钴粉氯化钴四氧化三钴硫酸钴钴中间品氧化钴碳酸钴钴酸锂锰锰矿电解锰电池级硫酸锰锂电正负极三元前驱体磷酸铁正极材料石油焦针状焦包覆沥青人造石墨硅碳负极硅氧负极电解液隔膜隔膜电解液电芯

国产光刻机温控技术突破日竞控制新型专利曝光

2025-02-19 10:51:34 来源：北方有色网责任编辑：韩泽楷

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2024年12月9日，国家知识产权局最新公开信息显示，安徽日竞控制技术有限公司于2024年8月申请的**“光刻机超静态精密温度供液控制系统”**（公开号CN119087749A）正式进入实质审查阶段。该专利瞄准光刻机热管理核心技术瓶颈，提出创新性解决方案。

技术架构与创新亮点

动态仿真模型构建
- 建立蒸发循环制冷系统的全维度数字孪生模型，精准模拟**压缩机（双级变频设计）、蒸发器（微通道结构）、冷凝器（射流冷却技术）及膨胀阀（智能电子式）**等核心部件的动态特性，仿真精度达±0.05℃。
智能控制算法突破
- 融合模糊PID控制与Smith预估器的智能算法架构，实现±0.001℃级温度稳定性控制，较传统PID算法响应时间缩短40%，超调量降低65%。
- 集成深度学习模型，可自适应匹配DUV/EUV光刻机的差异化热负荷需求（范围覆盖5kW-35kW）。
跨系统协同优化
- 开发传热特性分析模型，打通制冷系统与**精密加热模块（薄膜式纳米加热器）**的耦合控制，在1秒内完成10^4量级的热扰动补偿。

产业价值与实验数据

良率提升：实验数据显示，系统可将曝光线宽误差控制在±1.5nm以内，显著提升28nm以下制程的良品率（实测提升12%-15%）。
能耗优化：制冷系统COP值（能效比）达4.3，较现有方案节能22%，单台光刻机年节电超50万度。
国产替代：该技术突破为国产浸没式光刻机的热管理模块提供了关键解决方案，有望应用于下一代EUV光刻机研发。

行业意义：此专利标志着我国在光刻机核心温控领域实现自主突破，相关技术参数已超越ASML Twinscan NXT系列光刻机的温控精度（±0.005℃），为国产半导体设备产业链补上关键一环。

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国产光刻机温控技术突破 日竞控制新型专利曝光

技术架构与创新亮点

产业价值与实验数据

国产光刻机温控技术突破日竞控制新型专利曝光