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安徽日竞：新专利解锁光刻机温度精准控制 “密码”

2025-02-21 10:48:40 来源：北方有色网责任编辑：韩泽楷

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2024 年 12 月 9 日，国家知识产权局公开信息显示，安徽日竞控制技术有限公司于 2024 年 8 月提交了一项名为 “一种光刻机超静态精密温度供液控制系统” 的专利申请，其公开号为 CN119087749A 。

从专利摘要可知，该发明聚焦于光刻机温度控制技术领域。其构建了制冷系统的动态仿真模型，该模型可针对蒸发循环制冷系统的运行状况展开模拟与分析。在这一制冷系统中，压缩机、蒸发器、冷凝器以及膨胀阀均具备特定的结构配置，协同运作。同时，还设有精密加热温控系统传热特性的分析模型。

在控制策略上，该系统采用了模糊 PID 控制与 Smith 预估器相结合的智能控制方式。凭借这种方式，系统能够更为精准地对温度进行调控，有效减少超调量，缩短响应时间。这一特性对于光刻过程意义重大，毕竟光刻环节中，哪怕极其细微的温度波动，都可能对光刻质量产生不容忽视的影响。通过改进后的控制算法，该系统能够依据不同的热负荷以及不断变化的操作条件，自动进行适应性调整，确保在各类复杂环境下，都能稳定输出恒定温度，进而显著提升光刻图案的精确度与一致性，为光刻技术的发展提供有力支撑。

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