安徽日竞：新专利解锁光刻机温度精准控制 “密码”

基础金属	铜电解铜铜精矿铜管铜棒废铜铜排铜合金精铜杆再生铜杆铜板带铝铝土矿氧化铝电解铝铝辅料铝棒铝合金锭废铝铝杆铝型材铝板卷铅铅精矿铅锭铅蓄电池再生精铅还原铅废铅蓄电池铅合金锌锌精矿电解锌锌合金氧化锌锌粉锡锡精矿锡锭锡材镁
稀有金属	稀土稀土矿稀土氧化物稀土金属钕铁硼稀散金属锑铋铟锗镓硒钽锆贵金属白银钨钨精矿 APT(仲钨酸铵)钨粉碳化钨钨酸钠钨条钨铁钨材钼钼精矿工业氧化钼钼铁钼化工高纯三氧化钼钼金属钛钛精矿钛渣四氯化钛海绵钛钛金属钛白粉硒
新能源	锂锂矿锂化合物金属锂镍镍矿镍铁精炼镍镍盐高冰镍 MHP 钴电解钴钴粉氯化钴四氧化三钴硫酸钴钴中间品氧化钴碳酸钴钴酸锂锰锰矿电解锰电池级硫酸锰锂电正负极三元前驱体磷酸铁正极材料石油焦针状焦包覆沥青人造石墨硅碳负极硅氧负极硅

基础金属

铜电解铜铜精矿铜管铜棒废铜铜排铜合金精铜杆再生铜杆铜板带铝铝土矿氧化铝电解铝铝辅料铝棒铝合金锭废铝铝杆铝型材铝板卷铅铅精矿铅锭铅蓄电池再生精铅还原铅废铅蓄电池铅合金锌锌精矿电解锌锌合金氧化锌锌粉锡锡精矿锡锭锡材镁

稀有金属

稀土稀土矿稀土氧化物稀土金属钕铁硼 稀散金属锑铋铟锗镓硒钽锆 贵金属白银钨钨精矿 APT(仲钨酸铵)钨粉碳化钨钨酸钠钨条钨铁钨材钼钼精矿工业氧化钼钼铁钼化工高纯三氧化钼钼金属钛钛精矿钛渣四氯化钛海绵钛钛金属钛白粉硒

新能源

锂锂矿锂化合物金属锂镍镍矿镍铁精炼镍镍盐高冰镍 MHP 钴电解钴钴粉氯化钴四氧化三钴硫酸钴钴中间品氧化钴碳酸钴钴酸锂锰锰矿电解锰电池级硫酸锰 锂电正负极三元前驱体磷酸铁正极材料石油焦针状焦包覆沥青人造石墨硅碳负极硅氧负极硅

安徽日竞：新专利解锁光刻机温度精准控制 “密码”

2025-02-21 10:48:40 来源：北方有色网责任编辑：韩泽楷

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2024 年 12 月 9 日，国家知识产权局公开信息显示，安徽日竞控制技术有限公司于 2024 年 8 月提交了一项名为 “一种光刻机超静态精密温度供液控制系统” 的专利申请，其公开号为 CN119087749A 。

从专利摘要可知，该发明聚焦于光刻机温度控制技术领域。其构建了制冷系统的动态仿真模型，该模型可针对蒸发循环制冷系统的运行状况展开模拟与分析。在这一制冷系统中，压缩机、蒸发器、冷凝器以及膨胀阀均具备特定的结构配置，协同运作。同时，还设有精密加热温控系统传热特性的分析模型。

在控制策略上，该系统采用了模糊 PID 控制与 Smith 预估器相结合的智能控制方式。凭借这种方式，系统能够更为精准地对温度进行调控，有效减少超调量，缩短响应时间。这一特性对于光刻过程意义重大，毕竟光刻环节中，哪怕极其细微的温度波动，都可能对光刻质量产生不容忽视的影响。通过改进后的控制算法，该系统能够依据不同的热负荷以及不断变化的操作条件，自动进行适应性调整，确保在各类复杂环境下，都能稳定输出恒定温度，进而显著提升光刻图案的精确度与一致性，为光刻技术的发展提供有力支撑。

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基本文件流程错误 SQL 调试

/websites/wwwroot/cmcc/public/index.php ( 0.75 KB )
/websites/wwwroot/cmcc/thinkphp/start.php ( 0.72 KB )
/websites/wwwroot/cmcc/thinkphp/base.php ( 2.60 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Loader.php ( 21.07 KB )
/websites/wwwroot/cmcc/vendor/composer/autoload_static.php ( 3.95 KB )
/websites/wwwroot/cmcc/vendor/symfony/polyfill-mbstring/bootstrap.php ( 8.26 KB )
/websites/wwwroot/cmcc/vendor/ezyang/htmlpurifier/library/HTMLPurifier.composer.php ( 0.10 KB )
/websites/wwwroot/cmcc/vendor/topthink/think-captcha/src/helper.php ( 1.94 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Route.php ( 60.23 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Config.php ( 6.38 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Validate.php ( 41.63 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Error.php ( 3.75 KB )
/websites/wwwroot/cmcc/thinkphp/convention.php ( 10.37 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/App.php ( 21.51 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Request.php ( 49.78 KB )
/websites/wwwroot/cmcc/application/config.php ( 10.17 KB )
/websites/wwwroot/cmcc/application/database.php ( 1.96 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Hook.php ( 4.71 KB )
/websites/wwwroot/cmcc/application/tags.php ( 0.96 KB )
/websites/wwwroot/cmcc/application/common.php ( 37.25 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Env.php ( 1.21 KB )
/websites/wwwroot/cmcc/thinkphp/helper.php ( 17.30 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Lang.php ( 7.41 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Log.php ( 6.05 KB )
/websites/wwwroot/cmcc/thinkphp/lang/zh-cn.php ( 11.81 KB )
/websites/wwwroot/cmcc/application/route.php ( 4.08 KB )
/websites/wwwroot/cmcc/application/index/controller/News.php ( 30.40 KB )
/websites/wwwroot/cmcc/application/index/controller/Base.php ( 3.86 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Controller.php ( 6.07 KB )
/websites/wwwroot/cmcc/thinkphp/library/traits/controller/Jump.php ( 4.90 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/View.php ( 6.77 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/view/driver/Think.php ( 5.64 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Template.php ( 44.90 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/template/driver/File.php ( 2.24 KB )
/websites/wwwroot/cmcc/application/common/library/RedisUtil.php ( 0.83 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Cache.php ( 6.10 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/cache/driver/Redis.php ( 5.37 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/cache/Driver.php ( 5.98 KB )
/websites/wwwroot/cmcc/application/admin/model/Para.php ( 0.09 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Model.php ( 69.14 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Db.php ( 6.67 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/db/connector/Mysql.php ( 3.89 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/db/Connection.php ( 29.97 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/db/Query.php ( 96.74 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/db/builder/Mysql.php ( 4.53 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/db/Builder.php ( 31.55 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Debug.php ( 7.13 KB )
/websites/wwwroot/cmcc/application/admin/model/News.php ( 3.74 KB )
/websites/wwwroot/cmcc/application/admin/model/Cate.php ( 0.59 KB )
/websites/wwwroot/cmcc/application/admin/model/Admin.php ( 0.09 KB )
/websites/wwwroot/cmcc/application/common/consts/NewsConst.php ( 0.28 KB )
/websites/wwwroot/cmcc/application/admin/model/IndexCate.php ( 0.45 KB )
/websites/wwwroot/cmcc/application/common/consts/CommonConst.php ( 0.71 KB )
/websites/wwwroot/cmcc/runtime/temp/ae754a079b49dad486f0fa457bc10d5b.php ( 139.96 KB )
/websites/wwwroot/cmcc/application/common/consts/CacheConst.php ( 0.26 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Url.php ( 12.72 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/Response.php ( 8.28 KB )
/websites/wwwroot/cmcc/thinkphp/library/think/debug/Html.php ( 4.17 KB )

[ DB ] CONNECT:[ UseTime:0.000443s ] mysql:host=127.0.0.1;port=3306;dbname=ysscdb;charset=utf8mb4
[ SQL ] SHOW COLUMNS FROM `tb_para` [ RunTime:0.000676s ]
[ SQL ] SELECT * FROM `tb_para` WHERE `id` = 1 LIMIT 1 [ RunTime:0.000464s ]
[ SQL ] SHOW COLUMNS FROM `tb_news` [ RunTime:0.000589s ]
[ SQL ] SELECT * FROM `tb_news` WHERE `id` = 744 LIMIT 1 [ RunTime:0.000414s ]
[ SQL ] SHOW COLUMNS FROM `tb_cate` [ RunTime:0.000544s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `id` = 102 LIMIT 1 [ RunTime:0.000349s ]
[ SQL ] SHOW COLUMNS FROM `tb_admin` [ RunTime:0.000527s ]
[ SQL ] SELECT * FROM `tb_admin` WHERE `id` = 5 LIMIT 1 [ RunTime:0.000379s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `id` = 16 LIMIT 1 [ RunTime:0.000349s ]
[ SQL ] SELECT `id`,`title`,`url` FROM `tb_news` WHERE `cate_id` = 98 ORDER BY `submit_date` DESC LIMIT 10 [ RunTime:0.004194s ]
[ SQL ] SHOW COLUMNS FROM `tb_index_cate` [ RunTime:0.000547s ]
[ SQL ] SELECT * FROM `tb_index_cate` WHERE `cate_aid` = 1 ORDER BY `sortid` ASC [ RunTime:0.000428s ]
[ SQL ] select dt,num from tb_price where check_status=1 and cate_aid=1 and cate_bid=10 and cate_cid=27 and area_aid=1 and area_bid=9 and area_cid=41 and mode01=113 and mode02=-1 and mode03=941 and mode04=-1 and mode05=1899 order by dt desc limit 2 [ RunTime:0.209558s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `id` = 10 LIMIT 1 [ RunTime:0.000451s ]
[ SQL ] select dt,num from tb_price where check_status=1 and cate_aid=1 and cate_bid=11 and cate_cid=38 and area_aid=1 and area_bid=14 and area_cid=91 and mode01=184 and mode02=621 and mode03=1095 and mode04=-1 and mode05=1899 order by dt desc limit 2 [ RunTime:0.199464s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `id` = 11 LIMIT 1 [ RunTime:0.000469s ]
[ SQL ] select dt,num from tb_price where check_status=1 and cate_aid=1 and cate_bid=12 and cate_cid=46 and area_aid=1 and area_bid=9 and area_cid=41 and mode01=325 and mode02=-1 and mode03=1231 and mode04=-1 and mode05=1899 order by dt desc limit 2 [ RunTime:0.198772s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `id` = 12 LIMIT 1 [ RunTime:0.000411s ]
[ SQL ] select dt,num from tb_price where check_status=1 and cate_aid=1 and cate_bid=13 and cate_cid=49 and area_aid=1 and area_bid=9 and area_cid=41 and mode01=377 and mode02=696 and mode03=1275 and mode04=-1 and mode05=1899 order by dt desc limit 2 [ RunTime:0.213078s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `id` = 13 LIMIT 1 [ RunTime:0.000343s ]
[ SQL ] select dt,num from tb_price where check_status=1 and cate_aid=1 and cate_bid=14 and cate_cid=54 and area_aid=1 and area_bid=9 and area_cid=41 and mode01=419 and mode02=-1 and mode03=1400 and mode04=-1 and mode05=1899 order by dt desc limit 2 [ RunTime:0.210598s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `id` = 14 LIMIT 1 [ RunTime:0.000431s ]
[ DB ] CONNECT:[ UseTime:0.000522s ] mysql:host=127.0.0.1;port=3306;dbname=yousedb;charset=utf8
[ SQL ] SHOW COLUMNS FROM `tb_corporation` [ RunTime:0.000679s ]
[ SQL ] SELECT `id`,`title`,`city_id`,`area_id`,`state`,`status`,`hit`,`shop_url`,`category_pid` FROM `tb_corporation` WHERE ( `status` = 1 AND `edit_time` >= '2026-01-08 01:53:17' ) LIMIT 50 [ RunTime:0.000658s ]
[ SQL ] SHOW COLUMNS FROM `tb_news` [ RunTime:0.000493s ]
[ SQL ] SELECT `id`,`title`,`tag`,`category_id`,`area_id`,`add_mode`,`check_status` FROM `tb_news` WHERE `check_status` = 1 ORDER BY `hit` DESC,`submit_date` DESC LIMIT 0,50 [ RunTime:0.027504s ]
[ SQL ] SHOW COLUMNS FROM `tb_advert` [ RunTime:0.000831s ]
[ SQL ] SELECT * FROM `tb_advert` WHERE `id` = 1 LIMIT 1 [ RunTime:0.000407s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 10 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC LIMIT 8 [ RunTime:0.002426s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 11 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC LIMIT 8 [ RunTime:0.002406s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 2 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC LIMIT 6 [ RunTime:0.002283s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 12 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC LIMIT 5 [ RunTime:0.001928s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 13 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC LIMIT 5 [ RunTime:0.001968s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 3 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC LIMIT 6 [ RunTime:0.002054s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 3246 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.001391s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 3248 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.001602s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 3245 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.001867s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 10 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.002335s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 11 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.002354s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 12 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.002474s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 13 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.002093s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 14 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.001823s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 19 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.002355s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 15 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.001710s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 16 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.001722s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 17 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.001579s ]
[ SQL ] SELECT * FROM `tb_cate` WHERE `pid` = 3 AND ( `id` < 3871 AND `id` NOT IN (25,3243,3244) ) ORDER BY `sortid` ASC [ RunTime:0.001379s ]
[ SQL ] SELECT * FROM `tb_advert` WHERE `id` = 48 LIMIT 1 [ RunTime:0.000385s ]
[ SQL ] SELECT * FROM `tb_advert` WHERE `id` = 49 LIMIT 1 [ RunTime:0.000331s ]
[ SQL ] SELECT * FROM `tb_advert` WHERE `id` = 50 LIMIT 1 [ RunTime:0.000341s ]
[ SQL ] SELECT * FROM `tb_para` WHERE `id` = 1 LIMIT 1 [ RunTime:0.000451s ]

安徽日竞：新专利解锁光刻机温度精准控制 “密码”

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